PSA Oxygen Generator For Semiconductor

Name: China Custom PSA Oxygen Generator For Semiconductor Suppliers Factory - Wholesale Service - NEWTEK INDUSTRY
Brand: NEWTEK
SKU: 264582487

In the context of semiconductor manufacturing's extremely high requirements for gas purity and stability, the PSA oxygen generator uses pressure swing adsorption (PSA) technology, uses air as raw material, and takes advantage of the difference in gas adsorption capacity of the adsorbent under different pressures to efficiently separate high-purity oxygen. The oxygen generator can output oxygen with precise purity and stable flow, meeting the stringent requirements for oxygen in all aspects of semiconductor manufacturing from wafer processing to chip packaging. The equipment has a high degree of automation, can operate stably for a long time, reduce operation and maintenance costs, and can flexibly adjust various parameters to create a reliable, efficient and economical oxygen supply solution for semiconductor manufacturers, helping the semiconductor industry improve production efficiency and product quality.

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Description

Technical Parameters

Why does the semiconductor industry need PSA oxygen generators?

High-purity gas supply: Semiconductor manufacturing has strict requirements on gas purity, and high-purity oxygen is indispensable for lithography, cleaning and other links. With the help of pressure swing adsorption technology, PSA oxygen generator produces oxygen with a purity of 95%±3%, which meets the requirements of oxide layer formation and wafer cleaning, and avoids the risk of impurity contamination of traditional gas cylinder oxygen supply.
Ensure process stability: Semiconductor production lines require a continuous and stable gas supply. PSA oxygen generator uses double adsorption towers to work alternately, and through PLC intelligent control, it can achieve 24-hour uninterrupted oxygen supply, avoid production interruptions caused by manual bottle replacement, and adapt to processes sensitive to air pressure such as thin film deposition and etching.
Reduce costs and optimize space: Compared with liquid oxygen storage tanks and high-pressure gas cylinders, PSA oxygen generators produce oxygen on-site, greatly reducing transportation and storage costs. It has a small footprint and supports modular expansion, which meets the needs of maximizing space utilization in clean workshops of semiconductor factories. The long-term use cost is about 20% lower than the traditional method.
Adapt to special processes: In advanced processes, some special processes require precise control of oxygen concentration. The PSA oxygen generator can flexibly adjust the oxygen output purity (95%-99.9%) by adjusting the adsorption pressure and molecular sieve ratio to meet the special process requirements of 3D NAND flash memory manufacturing.
Environmentally friendly and easy to maintain: PSA technology does not require chemical reagents, and the oxygen production process does not emit harmful substances, which meets the environmental protection standards of the semiconductor industry. The equipment uses food-grade stainless steel and self-cleaning molecular sieves, with a maintenance cycle of up to 3-5 years, and is suitable for high-cleanliness wafer manufacturing environments.

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Why Does The Semiconductor Industry Need PSA Oxygen Generators?

category	Parameter Details
Oxygen purity	93%-99.5% (ULPA filtration system can be customized, impurity content ≤1ppb)
Output pressure	0.5-1.5MPa (adjustable, adapted to the air intake standard of semiconductor equipment)
Flow range	10-5000Nm³/h (supports parallel expansion of multiple units)
Dew point	≤-70℃(to prevent water vapor from polluting the process environment)
Energy efficiency	≤0.38kWh/Nm³ (high-efficiency variable frequency drive, energy saving more than 30%)
Noise Level	≤65dB (low vibration structure + soundproof shell, in line with Class 1000 clean room standards)

The core advantages of PSA oxygen generator

99% PSA Oxygen Generator For Gold Mining

Ultra-high purity guarantee
Double-layer molecular sieve bed and catalytic oxidation unit are used to deeply remove impurities such as hydrocarbons and CO₂, and the oxygen purity reaches more than 99.5%, meeting the SEMI F20 standard. Built-in real-time online analyzer, data synchronization to the factory SCADA system to ensure process stability.

Intelligent control and redundant design
Integrated PLC+HMI control system, supports remote monitoring, fault self-diagnosis and emergency switching (double-tower redundant adsorption). Automatic pressure compensation technology to cope with the instantaneous high flow demand of semiconductor equipment.

Low-carbon energy-saving solution
VPSA (vacuum pressure swing adsorption) synergistic technology reduces energy consumption, saving 15%-20% energy compared to traditional PSA.Optional waste heat recovery module to reduce workshop heat load.

Clean room compatibility
All stainless steel flow channel + nano coating to avoid metal ion contamination; zero leakage sealing design, passed ISO 8573-1 Class 0 certification.

PSA Oxygen Plant Types

Modular Equipment

Twin Tower Equipment

Containerized Equipment

				NTK95 Series PSA Oxygen Generator Selection
No.	Models	Capacity (Nm3/hr)	Purity	Power consumption of 1Nm3 oxygen produced (kw/h)	Number of bottles flled in 12 hours(pcs)	Operator needed
1	NTK95-5P	5	95%+-1%	3.54	10	2
2	NTK95-10P	10	95%+-1%	2.52	20	2
3	NTK95-15P	15	95%+-1%	2.31	30	2
4	NTK95-20P	20	95%+-1%	2.13	40	2
5	NTK95-25P	25	95%+-1%	2.01	50	2
6	NTK95-30P	30	95%+-1%	2.09	60	2
7	NTK95-40P	40	95%+-1%	1.81	80	2
8	NTK95-50P	50	95%+-1%	1.94	100	2
9	NTK95-60P	60	95%+-1%	1.62	120	2
10	NTK95-80P	80	95%+-1%	1.92	160	2
11	NTK95-100P	100	95%+-1%	1.83	200	2

FAQ

1. How high can the oxygen purity be, and does it meet the requirements of semiconductor manufacturing?
Our PSA oxygen generator for semiconductors can routinely produce oxygen with a purity of 95%±3%. For some processes that require extremely high oxygen purity, by adjusting the equipment parameters, the oxygen output purity can be flexibly controlled within the range of 95% - 99.9%, fully meeting the stringent requirements for gas purity in core links such as semiconductor lithography, cleaning, and oxidation.

2. How stable is the equipment, and can it ensure the continuous operation of the semiconductor production line?
The equipment adopts a double adsorption tower alternating working mode, combined with a PLC intelligent control system, to achieve 24-hour uninterrupted and stable oxygen supply. This automated operation mode avoids gas supply interruptions caused by manual bottle replacement, provides reliable and stable gas supply for processes such as thin film deposition and etching that are sensitive to air pressure, and effectively reduces the risk of production interruptions caused by gas supply problems.

3. Compared with traditional oxygen supply methods, what is the cost of use?
Compared with liquid oxygen storage tanks or high-pressure gas cylinders, our PSA oxygen generator adopts on-site oxygen production mode, which greatly saves oxygen transportation and storage costs. The equipment occupies a small area and can be expanded modularly, reducing site rental costs. In the long term, the cost is about 20% lower than the traditional oxygen supply method, which significantly saves operating costs.

4. Is the maintenance of the equipment complicated? How long is the maintenance cycle?
The equipment is easy to maintain, using food-grade stainless steel and self-cleaning molecular sieves, which greatly reduces the maintenance workload. Under normal circumstances, the maintenance cycle is as long as 3-5 years, and we are equipped with a professional after-sales team to provide technical support at any time to help you solve problems during the operation of the equipment.

Act Now to Secure Your Oxygen Supply Chain

✅ Customized Solutions:
Tell us your bed capacity and peak demand for a tailored proposal.
✅ Fast Delivery:
Pre-engineered modules shipped in 8-12 weeks.
✅ Financing Options:
Lease-to-own plans available.

Phone Number

+86 15888864725

WhatsApp Number

+86 15888864725

E-mail

sales@newtek-group.com

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